Vacuum Systems and Parts
Vacuum systems are based on pump technology from EDWARDS or Leybold.
They essentially consist of combinations of Vacuum pumps and High speed actuator. We at BMI have the technology to match any vacuum atmosphere desired by customers, from low vacuum to high vacuum (10-9 Torr).
[Vacuum chamber with high speed actuator] Vacuum Chamber with High Speed Actuator
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- Product Name
- Vacuum Chamber with High Speed Actuator
The high-speed actuator within this vacuum chamber refers to a device or mechanism capable of performing fast and precise movements or operations within the vacuum environment. This actuator could be a motor-driven system, pneumatic or hydraulic mechanism, or any other device designed to exert force or motion quickly and accurately.
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High speed moving stage | |
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Vacuum chamber |
Specifications |
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Product number | |
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Dimension |
On request |
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High speed moving stage |
Specifications |
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Product number |
SM-L200 |
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Orientation |
Any position |
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Supporting flange |
Custum flange(O-ring, CF, ISO) ISO DN100KF |
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Maximum leak rate |
2 x 10-10 torr liters/second |
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Actuator type (Option 1) for dual type |
Electric control by linear position control |
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Position spatial resolution |
10 μm |
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Maximum translation length |
150 mm |
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Scan velocity |
30 mm/sec |
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Controller power |
200-240 V AC, 1Ph |
Packing Packing costs are included in the price.
Terms of delivery Prices include delivery but not VAT