Lab type 40 keV Proton Implantation Device > Semiconductor Device

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Semiconductor Device 


  BMI has succeeded in developing laboratory-scale ion implantation equipment to enter the semiconductor manufacturing equipment field, and is conducting Si28-related research based on a deposition system for quantum computers.








[Semiconductor Device] Lab type 40 keV Proton Implantation Device

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Product Name
Lab type 40 keV Proton Implantation Device
1.400 keV Low-Current Ion Accelerator

 

  ION Source Systems including :  

     - Ion source module including

        . Multi-cusp ion source

        . Source gas system including

 . Gas feed module for non-toxic gas from high-pressure type  gas tank

 . Exhaust

               . Isolation transformer

               . Extraction geometry

          . Extraction gap

          . Electrostatic Einzel lens

          . Dipole magnet  (15° or 90°  analyzing magnet)

          . Beam X-Slit Module (Manually adjustable mass defining X-slit)

          . Beam position monitor

          . Current measuring module (Water-cooled Faraday Cup)


  Vacuum system including 

    - Turbo Molecular Pump(TMP) with Controller 2 set

         . TMP for pre-acceleration systems

         . TMP for post-acceleration systems

    - Backing Pump (Scroll Dry pump) 2 set

         . Dry pump for pre-acceleration systems

    - Vacuum measuring equipment 2 set

    -  All necessary vacuum part

         . Vacuum valves

          . Bellows

          . Angle valves

          . Vacuum tubing


  Water cooling systems including 

      - Air cooling type Chiller

      - Fittings and water tubing  for chilling

      - Water drain


  Dry Air compressor 

      - Compressed air tubing


  PLC control systems 

     - Interfaces for computer control

     - All necessary electronics and power supplies

     - Fiber-optic links

     - Electrical cabling and earth strips


  Remote computer control systems  

      - LabView based Ion Accelerator control program

      - Industrial type computer

      - Two flat screen monitor

      - Keyboard, mouse and printer

      - Interfaces for field bus control system