Semiconductor Device
BMI has succeeded in developing laboratory-scale ion implantation equipment to enter the semiconductor manufacturing equipment field, and is conducting Si28-related research based on a deposition system for quantum computers.
[Semiconductor Device] Lab type 40 keV Proton Implantation Device
본문
- Product Name
- Lab type 40 keV Proton Implantation Device
◆ ION Source Systems including :
- Ion source module including
. Multi-cusp ion source
. Source gas system including
. Gas feed module for non-toxic gas from high-pressure type gas tank
. Exhaust
. Isolation transformer
. Extraction geometry
. Extraction gap
. Electrostatic Einzel lens
. Dipole magnet (15° or 90° analyzing magnet)
. Beam X-Slit Module (Manually adjustable mass defining X-slit)
. Beam position monitor
. Current measuring module (Water-cooled Faraday Cup)
◆ Vacuum system including
- Turbo Molecular Pump(TMP) with Controller 2 set
. TMP for pre-acceleration systems
. TMP for post-acceleration systems
- Backing Pump (Scroll Dry pump) 2 set
. Dry pump for pre-acceleration systems
- Vacuum measuring equipment 2 set
- All necessary vacuum part
. Vacuum valves
. Bellows
. Angle valves
. Vacuum tubing
◆ Water cooling systems including
- Air cooling type Chiller
- Fittings and water tubing for chilling
- Water drain
◆ Dry Air compressor
- Compressed air tubing
◆ PLC control systems
- Interfaces for computer control
- All necessary electronics and power supplies
- Fiber-optic links
- Electrical cabling and earth strips
◆ Remote computer control systems
- LabView based Ion Accelerator control program
- Industrial type computer
- Two flat screen monitor
- Keyboard, mouse and printer
- Interfaces for field bus control system