Rail systems
[High speed moving stage] High Speed Moving Stage
본문
- Product Name
- High Speed Moving Stage
The high-speed actuator within this vacuum chamber refers to a device or mechanism capable of performing fast and precise movements or operations within the vacuum environment. This actuator could be a motor-driven system, pneumatic or hydraulic mechanism, or any other device designed to exert force or motion quickly and accurately.
|
High speed moving stage | |
|
High speed moving stage |
Specifications |
|
Product number |
SM-L200 |
|
Orientation |
Any position |
|
Supporting flange |
Custum flange(O-ring, CF, ISO) ISO DN100KF |
|
Maximum leak rate |
2 x 10-10 torr liters/second |
|
Actuator type (Option 1) for dual type |
Electric control by linear position control |
|
Position spatial resolution |
10 μm |
|
Maximum translation length |
150 mm |
|
Scan velocity |
30 mm/sec |
|
Controller power |
200-240 V AC, 1Ph |
Packing Packing costs are included in the price.
Terms of delivery Prices include delivery but not VAT