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Rail systems



[High speed moving stage] High Speed Moving Stage

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Product Name
High Speed Moving Stage

 The high-speed actuator within this vacuum chamber refers to a device or mechanism capable of performing fast and precise movements or operations within the vacuum environment. This actuator could be a motor-driven system, pneumatic or hydraulic mechanism, or any other device designed to exert force or motion quickly and accurately.


High speed moving stage

High speed moving stage

Specifications

Product number

SM-L200

Orientation

Any position

Supporting flange

Custum flange(O-ring, CF, ISO)

ISO DN100KF

Maximum leak rate

2 x 10-10 torr liters/second

Actuator type (Option 1) for dual type

Electric control by linear position control

Position spatial resolution

10 μm

Maximum translation length

150 mm

Scan velocity

30 mm/sec

Controller power

200-240 V AC, 1Ph



Packing   Packing costs are included in the price.

Terms of delivery  Prices include delivery but not VAT