Beam Diagnostic systems and parts
The beam diagnostic chamber is a module for measuring beam characteristics by placing pepper-pot emittance meter, wire scanner, faraday cup and X-Slit collimator. Beam size measurement is carried out in two ways. High-energy beam size measurement is measured using a wire scanner, and low-energy beam size measurement is measured using a screen monitor. Beam current is measured using a Faraday cup, and the desired current value can be obtained while adjusting the size of the beam using a beam size adjuster (X-Slit collimator). The Einzel lens and Solenoid magnets are utilized to focus the particle beam. BPM is utilized to monitor the beam position.
[Beam Diagnostic Module] Beam Current meter(Faraday Cup)
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- Product Name
- Beam Current meter(Faraday Cup)
Faraday cup can precisely measure the current of a particle beam. They are utilized to measure the dose rate of the particle beam generated from various beam production systems and ion beam implantation systems of semi conductor. The resulting current can be measured and used to determine the number of ions or electrons hitting the cup. The Faraday cup provide in a single package the charge detection processor with pulse shaper.
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Faraday cup (beam current meter) | |
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Faraday cup |
Specifications |
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Product number |
FC-D40-L150-T0 |
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Collector size |
40 mm(Dia) |
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Cooling type |
Water |
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Core material |
OFGC copper |
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Electrical Feedthrough(signal) |
BNC Connectors |
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Suppression voltage |
-1 kev to -2 keV |
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Orientation |
Any position |
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Supporting flange |
Custum flange(O-ring, CF, ISO) |
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Maximum leak rate |
2 x 10-10 torr liters/second |
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Actuator type (Option 1) |
Electric control by linear position control |
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Position spatial resolution |
10 μm |
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Maximum translation length |
150 mm |
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Scan velocity |
15 mm/sec |
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Controller power |
200-240 V AC, 1Ph |
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Actuator type (Option 2) |
Pneumatic control (Air/24VDC) |
Packing Packing costs are included in the price.
Terms of delivery Prices include delivery but not VAT