Development of small ion implantation equipment for 40keV class research based on proton-induced gamma-ray generation technology > Performance of Government-funded projects

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Performance of Government-funded projectsR&D Center

Development of small ion implantation equipment for 40keV class resear…

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2024-05-07 14:06 728 0

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Multi-cusp proton ion source development

Specimen Loading Chamber development

Development of ion implantation equipment for Lab scale research

Performance Analysis of Ion Injection Equipment for Lab Scale Research